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液晶与显示 2009, 24(5) 666-669  ISSN:  CN

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器件制备技术及器件物理
不同衬底上氧化锌薄膜的金属有机化学气相沉积方法生长
王超1;杨小天1,2;唐魏1;赵春雷1;杨佳1;高晓红1;李香萍3;高忠民4;杜国同3
1. 吉林建筑工程学院 电气与电子信息学院,吉林 长春 130021, E-mail:jlwangchao@yahoo.cn;2. 中国科学院 长春光学精密机械与物理研究所,吉林 长春 130033;3. 吉林大学 电子科学与工程学院, 吉林 长春 130012;4. 吉林大学 化学学院, 吉林 长春 130012
摘要

氧化锌;薄膜;生长;MOCVD

关键词 氧化锌薄膜通过金属有机化学气相沉积方法生长在康宁玻璃与&alpha   -蓝宝石衬底上   研究了有关薄膜的生长质量与发光特性。通过X光衍射方法测试研究发现   不仅在以&alpha   -蓝宝石为衬底的样品中   同时   在以玻璃为衬底的样品中都发现了氧化锌(0 0 2)方向生长的尖峰   表明生长在两种衬底上的样品都是高度的C向生长。对两种样品的荧光谱研究发现   两者的紫外峰位于374 nm附近   在以&alpha   -蓝宝石为衬底的样品中   有深能级发射   但在以玻璃为衬底的样品中没有发现   表明在玻璃衬底上我们生长出了高质量的氧化锌薄膜。通过原子力显微镜   对生长在两种衬底上薄膜的表面形貌做了观察   其晶粒的大小与表面粗糙度有一定的差别   表明二者都是以柱状形式生长的。  
Growth of ZnO Films on Different Substrates by Metal Organic Chemical Vapor Deposition
WANG Chao1;YANG Xiao-tian1,2;TANG Wei1;ZHAO Chun-lei1;YANG Jia1;GAO Xiao-hong3;LI Xiang-ping3;GAO Zhong-min4;DU Guo-tong3
1. Jilin Institute of Architecture and Civil Engineering, Changchun 130021,China, E-mail:jlwangchao@yahoo.cn;2. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033,China;3. College of Electronic Science & Engineering,Jilin University, Changchun 130012, China;4. College of Chemistry, Jilin University, Changchun 130012, China
Abstract:

ZnO thin films were grown on two kinds of substrates of Corning glass and α-Al2O3 by metal organic chemical vapor deposition. The properties of the films were studied. It was found the sharp diffraction peak for ZnO (002) by X-ray diffraction method, not only in the sample of the substrate of α-Al2O3(A), but also in the sample of the substrate of Corning glass(B), showing the two samples were highly c-axis oriented. The photoluminescence (PL) spectra of the ZnO films were studied. The UV emission at ~374 nm was found in sample A and B. The deep level emissions was found in the sample A, but not in the sample B, showing that the high quality ZnO films was grown on the substrate of glass. The surface morphology was studied by the AFM also. Though the average size of grain and the RMS(root-mean-square) value of the two samples is diffe-rent, comparing sample A with B, the result shows that sample A is more smooth. It can be found that the samples A and B were all grown in a column-by-column growth process.

Keywords: ZnO   thin films   growth   MOCVD  
收稿日期 2009-02-27 修回日期 1900-01-01 网络版发布日期 2009-10-30 
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参考文献:

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