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液晶与显示 2012, 27(2) 466-470  ISSN:  CN

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材料物理和化学
氮化硅在触摸屏中的应用分析
曲连杰, 陈旭, 郭建, 闵泰烨, 谢振宇, 张文余
北京京东方光电科技有限公司, 北京 100176
摘要: 研究了氮化硅材料在触摸屏领域中的应用,利用等离子体化学气相沉积技术,在一定厚度的玻璃表面沉积不同厚度的氮化硅薄膜。通过理论分析和试验测试的方法得到了氮化硅膜层厚度和折射率对触摸屏透过率以及表面宏观颜色的影响。分析结果表明,氮化硅膜层折射率对触摸屏的平均透过率影响明显,而膜层厚度对触摸屏的平均透过率影响很小,但是膜层厚度的改变对触摸屏特定波长处透过率和膜层宏观颜色影响很明显。在实际生产中可以通过改变沉积条件获得合适折射率及厚度的氮化硅薄膜材料。
关键词 薄膜晶体管液晶显示器   触摸屏   透过率   氮化硅  
Silicon Nitride Materials Applied in Touch Sensor
QU Lian-jie, CHEN Xu, GUO Jian, MIN Tae-yup, XIE Zhen-yu, ZHANG Wen-yu
Beijing BOE Optoelectronics Technology Co. Ltd., Beijing 100176, China
Abstract: The use of silicon nitride (SiN<em>x) in the field of touch sensor has been investigated. Silicon Nitride (SiN<em>x) with different thickness is deposited on the surface of bare glass by plasma-enhanced chemical vapor deposition technology. Using theoretical analysis and experimental test method, this article illuminates the impact on the touch sensor of transmittance and macro-color caused by film thickness and the refractive index. The results show that the refractive index of SiN<em>x has great impact on the average transmittance, while the film thickness has no obvious effect on it. The film thickness has great impact on transmittance at fixed-wavelength and the macro-color, and it is crucial to the process control.
Keywords: TFT LCD   touch sensor   transmittance   silicon nitride  
收稿日期 2012-02-24 修回日期 2012-04-25 网络版发布日期 2011-08-20 
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参考文献:
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